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  CO2 Laser Optics & Consumable Products / Mirrors
Mirrors
      RGQ and Order

Plano and Spherical Mirrors

Mirrors or total reflectors are used in laser cavities as rear reflectors and fold mirrors, and externally as beam benders in beam delivery systems.

Silicon is the most commonly used mirror substrate; its advantages are low cost, good durability, and thermal stability.

Copper is typically used in high-power applications for its high-thermal conductivity.

Molybdenum’s extremely tough surface makes it ideal for the most demanding physical environments. Molybdenum is normally offered uncoated.

Specifications
Standards
Dimensional Tolerances Diameter
Thickness
+0.000”-0.005”
+/-0.010”
Parallelism Plano
Radiused, Diameter < 1”
Radiused, Diameter > 1”
<= 3 arc minutes
<= 10 arc minutes
<= 5 arc minutes
Clear Aperture (polished) 90% of diameter
Surface Figure (power/irregularity) at 0.63µm Plano and
Radiused, r > 1 m

Power: 2 fringes
Irregularity: 1 fringe

Scratch-Dig 10-5
Part #
Description
Diameter
(inches)
Diameter
(mm)
Edge
Thickness
(inches)
Edge
Thickness
(mm)
Side 1
Coating
466761
Si
0.5
12.7
0.118
2.99
EG
850800
Si
1.0
25.4
0.120
3.05
ES
690933
Si
1.5
38.1
0.375
9.53
MMR
221987
Si
1.75
44.45
0.375
9.53
EG
408825
Si
2.0
50.8
0.200
5.08
DEMMR
341534
Si
2.0
50.8
0.200
5.08
TRZ
674480
Si
2.0
50.8
0.400
10.16
TRZ
614835
Si
3.0
76.2
0.250
6.35
TRZ
148570
Cu
1.1
37.94
0.236
5.99
EG
370229
Cu
1.969
50.01
0.200
5.08
TRZ
482518
Cu
1.969
50.01
0.354
8.99
EG
832216
Cu
1.969
50.01
0.394
10
TRZ
658306
Cu
2.362
59.99
0.236
5.99
TRZ
137530
Cu
4.0
101.6
0.75
19.05
PS
650010
Cu-WC*
4.25
107.95
1.5
38.1
ES
229095
Mo
4.0
101.6
0.350
8.89
UC
*WC is water-cooled copper
The above parts are plano. For spherical parts, please contact a II-VI sales representative.
Contact a II-VI sales representative for exact specifications.

Off-Axis Parabolic Mirrors

Mirrors, made from copper substrates, will withstand extremely high laser powers and industrial environments, providing diffraction limited focusing when properly mounted and aligned.

Copper mirrors are available with a higher reflectivity and durable molybdenum overcoating. This allows for the mirror’s easy cleaning.

Parabolic mirrors are designed for reflecting and focusing the laser beam through 90 degrees, or any other convenient angle.

Custom designed features, such as water cooling and non-standard mounting configurations, are available upon request.

 

 

 

 



To guarantee performance specification, all mounting surfaces must be properly conditioned, screw torques cannot exceed II-VI recommendations, and the laser source must be aligned to the parabolic axis.

Specifications
Standards
Diameter +0.00/-0.12 mm
Angle of Incidence +3.5 minutes
Working Distance ±0.008”
Clear Aperature 90% of mirror surface
Surface Roughness < 175 A RMS
Scratch-Dig 40-20
Surface Figure 2 Fringes peak to valley @ 632 nm

Part #
Description
Diameter
(mm)
Turning
Angle
Working
Distance
Mount
PM-CU-49.5-90-200-UC*-MM2
Cu
49.5
90º
200
MM2
PM-CU-49.5-90-125-UC*-MM2
Cu
49.5
90º
125
MM2
PM-CU-49.5-90-250-UC*-MM2
Cu
49.5
90º
250
MM2
PM-CU-49.5-90-175-UC*-MM2
Cu
49.5
90º
175
MM2
PM-CU-25-90-125-UC*-MM3
Cu
25
90º
125
MM3
PM-CU-25-90-200-UC*-MM3
Cu
25
90º
200
MM3
*UC is uncoated
Contact a II-VI sales representative for exact specifications.

Cylinder Mirrors

As the name suggests, cylindrical mirrors are either round or rectangular objects which have cylindrically shaped surfaces. They differ from spherical mirrors in that they focus a beam to a focal line rather than a focal point.

Reflectivity is improved by applying a highly reflective coating on the optical surface. Multilayer coatings are available for various areas of the light spectrum. Cylindrical mirrors are made from Cu, Si, Ge, Al, and other metallic materials.

Applications include laser scanners, laser diode systems, spectrophotometers, projectors, and optical data storage and retrieval systems.

 

 

 

 

 

 

Toroid Mirrors

In many applications, spherical mirrors, cylinder mirrors, and parabolic mirrors are used to help shape the laser beam. Biconic mirrors—or the more general toroidal mirrors—can be used to combine two separate optics into one.

Biconic mirrors have two different radii on one surface. It’s possible to make a biconic mirror with spherical curves or aspheric curves, depending on the application and need to eliminate aberrations. Toroids can replace common 90° bend mirrors to recollimate a laser beam

 

 

 

 

 

 

 

Galvo Mirrors

Scanning laser systems—whether for marking, engraving, or for drilling micro via holes—all rely on galvo mirrors to precisely position the laser beam. II-VI manufactures built-to-spec galvo mirrors from mirror-grade silicon substrates. We apply our precision thin-film coatings to these substrates, producing highly efficient galvo mirrors that reflect laser light in the 1.0 to 12.0 µm range.

Ideally suited for Nd:YAG lasers (1.06µm) and CO2 lasers (9.3 to 10.6 µm), II-VI galvo mirrors are suitable for a wide range of industrial applications. And for those applications requiring a visible helium-neon or diode laser alignment beam, our dual wavelength coatings provide maximum reflectivity for the CO2 laser infrared beam while providing good reflectivity for the visible alignment beam. Our Dual Enhanced Maximum Metal Reflection (DEMMR) coating is the best choice for this application. (Details are shown in Figures 1 and 2.)

 

 

 

 

II-VI galvo mirror sizes typically range from 0.5 to 4.0 inches in diameter, based on OEM specifications.

II-VI galvo mirrors feature

  • Mirror-grade silicon substrates
  • Greater thermal stability than fused silica
    substrates
  • Geometries built to OEM specifications
  • Highly reflective coatings for Nd:YAG lasers,
    CO2 lasers, and CO2 lasers with coaxial
    helium-neon or diode laser alignment
    beams

Applications include

  • Laser marking and engraving
  • Laser drilling
  • Laser welding
  • Rapid prototyping
  • Imaging and printing
  • Semiconductor processing (memory repair, laser trimming)
  • Remote laser welding

 

 

 

 

 

Variable Radius Mirrors

The II-VI Variable Radius Mirror (VRM) allows users to dynamically change their beam characteristics on the fly. By controlling the VRM’s radius of curvature with water pressure, users can adjust the laser beam divergence.

VRMs allow focus depth adjustment during material piercing; this produces optimum cutting speeds. It also allows flying optics systems manufacturers to compensate for focal length variations across the working table. This is especially important with large working tables, where laser beam divergence changes at the lens as the optical path moves across the work area.

The VRM is designed for use at near-normal angle of incidence. Many laser cutting systems use two mirrors as telescope optics. The telescope is made of one convex and one concave mirror. Replacing one of these mirrors with a VRM allows all of the benefits listed above.

Pressure Control
There are at least two ways to control the pressure in the VRM and, as a result, control the radius of the mirror surface. The key component is either a variable-speed pump or a proportional control valve. These items are driven by an amplifier. Input to the amplifier is typically a 0 to 10 volt signal. The amplifier is run open-ended or in a closed-loop system.

Custom Designs
II-VI has the engineering capability to design adaptive mirrors for any beam delivery system. Using proprietary design techniques, II-VI can accurately model the VRM shape and predict how it will deform under pressure. The mirror shape is optimized to match the pressure-radius curve defined by the customer.

Water Pressure System Example
The drawing below shows the closed-loop system that uses a pressure transducer to measure the pressure in the mirror cavity. This signal is fed back to the CNC controller.

Specifications
Standards
Substrate: Copper
Standard Mirror Diameter: 57.1 mm, 79.0 mm
Usable Clear Aperture: 35 mm, 50 mm
Radius Range*: 6 MCC - 6 MCX
3 MCC - PO
PO - 3 MCX
1.2 MCX - 1.6 MCX
Pressure Range: 3 to 11 bar
Water Flow Rate: ~1 liter/minute
Angle of Incidence: Near normal
Reflectivity with MMR-A Type Coating: > 99.8%
Pointing Stability: <= 30 arc seconds
*Customized radius range available.
M is meter, CC is concave, CX is convex , PO is plano

Standard Mirror Coatings

Uncoated Metal
Silver Based
Gold Based
Maximum Metal Reflector
Phase Retarding
Polarization Control
 
Al
Cu
Mo
PS
ES
BG
PG
EG
PEG
SEG
MMR
MMR-A
DEMMR
TRZ
λ/4 RPR*
λ/4 HRPR*
ATFR
PLM
PLM-W
%R @ 0º AOI @ 10.6µm
98.3
99.2
98.0
99.1
99.6
99.0
98.8
99.5
99.4
99.6
99.8
99.8
99.8
+
+
+
+
+
+
%R @ 45º AOI S-Pol @ 10.6µm
98.7
99.4
98.8
99.4
99.7
99.4
99.3
99.7
99.6
99.8
99.9
99.8
99.8
+
+
+
>=99.0
>=99.5
>=99.8
%R @ 45º AOI P-Pol @ 10.6µm
97.4
98.9
97.3
98.8
99.2
98.5
98.4
99.2
99.1
99.3
99.7
99.6
99.6
+
+
+
<=1.5
<=90.0
<=97.0
%R @ 45º AOI R-Pol @ 10.6µm
98.3
99.2
98.0
99.1
99.5
99.0
98.8
99.5
99.4
99.6
99.8
99.7
99.7
99.5
98.0
99.0
+
+
+
%R @ 45º AOI R-Pol @ 0.6328µm
~50-90
>90
~40-70
95
~60-95
90
80
~50-90
80
~50-90
40
80
80
80
+
+
80
+
+
Phase Retardation @ 45º AOI
<2º
<2º
<2º
6º-9º
+
<2º
+
+
+
+
<2º
+
+
<2º
90º+/-3º
90º+/-6º
+
+
+
* These products are used at 45º AOI with plane polarized light at 45º to the plane of incidence.
+ These products are not intended for use at these parameters.

   
 
           
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