Galvo Mirrors

Scanning laser systems—whether for marking, engraving, or for drilling micro via holes—all rely on galvo mirrors to precisely position the laser beam. II-VI manufactures built-to-spec galvo mirrors from mirror-grade silicon substrates. We apply our precision thin-film coatings to these substrates, producing highly efficient galvo mirrors that reflect laser light in the 1.0 to 12.0 µm range.

Ideally suited for Nd:YAG lasers (1.06µm) and CO2 lasers (9.3 to 10.6 µm), II-VI galvo mirrors are suitable for a wide range of industrial applications. And for those applications requiring a visible helium-neon or diode laser alignment beam, our dual wavelength coatings provide maximum reflectivity for the CO2 laser infrared beam while providing good reflectivity for the visible alignment beam. Our Dual Enhanced Maximum Metal Reflection (DEMMR) coating is the best choice for this application. (Details are shown in Figures 1 and 2.)

II-VI galvo mirror sizes typically range from 0.5 to 4.0 inches in diameter, based on OEM specifications.

II-VI galvo mirrors feature

  • Mirror-grade silicon substrates
  • Greater thermal stability than fused silica
  • Geometries built to OEM specifications
  • Highly reflective coatings for Nd:YAG lasers,
    CO2 lasers, and CO2 lasers with coaxial
    helium-neon or diode laser alignment

Applications include

  • Laser marking and engraving
  • Laser drilling
  • Laser welding
  • Rapid prototyping
  • Imaging and printing
  • Semiconductor processing (memory repair, laser trimming)
  • Remote laser welding